The Herculoids

Mekkano, the Machine Master / Tiny World of Terror (1x13)

Air date: Oct 21, 1967

Trained machines break Mekkano out of an intergalactic prison, where he vows to destroy the ones who put him in prison: Zandor and the Herculoids. Torrak shrinks the Herculoids down to microscopic size for the purpose of destroying them with his super-powered microorganisms and then enslaving the galaxy.